Interdigitated humidity sensors for a portable clinical microsystem.
basic_science · Level V
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Abstract
This paper presents and compares two capacitive humidity sensors with interdigitated electrodes for a portable clinical application. A polyimide-sensitive layer covers the first structures and the optimized ones include a benzocyclobutene-sensitive layer and a heating resistor. Humidity measurements results are presented, in particular sensors response time in absorption, which are very small (inferior to 500 ms). Next, mechanisms of absorption and adsorption in a polymer layer are described and the two structures are compared. Suitability of optimized sensors for our application is discussed: new structures allow us to increase sensitivity and decrease response time. When the structure is maintained at 40 degrees C by its heater, the response time is 200 ms and the total desorption time is 11 s.
Medical subject headings
- Biosensing Techniques
- Electric Capacitance
- Humidity
- Microelectrodes
- Monitoring, Physiologic