Rapid fabrication of microfluidic devices in poly(dimethylsiloxane) by photocopying.

Tan, A; Rodgers, K; Murrihy, J; O'Mathuna, C; Glennon, J D · Lab Chip · 2001

basic_science · Level V

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Abstract

A very simple and fast method for the fabrication of poly(dimethylsiloxane) (PDMS) microfluidic devices is introduced. By using a photocopying machine to make a master on transparency instead of using lithographic equipment and photoresist, the fabrication process is greatly simplified and speeded up, requiring less than 1.5 h from design to device. Through SEM characterization, any micro-channel network with a width greater than 50 microm and a depth in the range of 8-14 microm can be made by this method. After sealing to a Pyrex glass plate with micromachined platinum electrodes, a microfluidic device was made and the device was tested in FIA mode with on-chip conductometric detection without using either high voltage or other pumping methods.