Conductive atomic force microscope nanopatterning of hydrogen-passivated silicon in inert organic solvents.

Kinser, C Reagan; Schmitz, Matthew J; Hersam, Mark C · Nano Lett · 2005

basic_science · Level V

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Abstract

Ambient liquid phase atomic force microscope (AFM) techniques for nanopatterning organic molecules on silicon through direct Si-C bonds rely on reactions that are in direct competition with spurious oxidation. We study the effectiveness of an inert hydrophobic organic solvent at suppressing oxidation of hydrogen-passivated silicon under ambient conditions. Nanometer scale features were fabricated on an H:Si(111) substrate using a conductive AFM in hexadecane. The patterned features show chemical and kinetic behavior consistent with field induced oxidation (FIO) in air. The mechanism for FIO in hexadecane is discussed.