Nanometer patterning with ice.
basic_science · Level V
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- Record sourced from PubMed, PMID 15943460.
- Also identified by PMC identifier 1432218.
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Abstract
Nanostructures can be patterned with focused electron or ion beams in thin, stable, conformal films of water ice grown on silicon. We use these patterns to reliably fabricate sub-20 nm wide metal lines and exceptionally well-defined, sub-10 nanometer beam-induced chemical surface transformations. We argue more generally that solid-phase condensed gases of low sublimation energy are ideal materials for nanoscale patterning, and water, quite remarkably, may be among the most useful.
Medical subject headings
- Ice
- Nanotechnology
- Silicon