Temperature selective deposition of Parylene-C.

Charlson, E M; Charlson, E J; Sabeti, R · IEEE Trans Biomed Eng · 1992

basic_science · Level V

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Abstract

A new method for selectively depositing conformal, biocompatible coatings of Parylene-C on implantable integrated circuit structures is described. The technique consists of using thin film or diffused resistors to electrically heat the area where an opening in the Parylene is desired. Theoretically predicted and actual Parylene-C thickness are compared.

Medical subject headings