Fabrication of metallic nanodots in large-area arrays by mold-to-mold cross imprinting (MTMCI).

Kwon, Sunghoon; Yan, Xiaoming; Contreras, Anthony M; Liddle, J Alexander; Somorjai, Gabor A; Bokor, Jeffrey · Nano Lett · 2005

basic_science · Level V

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Abstract

We have developed a mold-to-mold cross imprint (MTMCI) process, which redefines an imprint mold with another imprint mold. By performing MTMCI on two identical imprint molds with silicon spacer nanowires in a perpendicular arrangement, we fabricated a large array of sub-30-nm silicon nanopillars. Large-area arrays of Pt dots are then produced using nanoimprint lithography with the silicon nanopillar mold.

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