Fabrication of metallic nanodots in large-area arrays by mold-to-mold cross imprinting (MTMCI).
basic_science · Level V
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Abstract
We have developed a mold-to-mold cross imprint (MTMCI) process, which redefines an imprint mold with another imprint mold. By performing MTMCI on two identical imprint molds with silicon spacer nanowires in a perpendicular arrangement, we fabricated a large array of sub-30-nm silicon nanopillars. Large-area arrays of Pt dots are then produced using nanoimprint lithography with the silicon nanopillar mold.
Medical subject headings
- Crystallization
- Nanotechnology
- Nanotubes
- Silicon
- Silicon Dioxide