Fabrication and characterization of three-dimensional InGaAs/GaAs nanosprings.
basic_science · Level V
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Abstract
This paper presents the use of a novel fabrication technique to produce three-dimensional (3D) nanostructures. The process is based on conventional microfabrication techniques to create a planar pattern in an InGaAs/GaAs bilayer that self-assembles into 3D structures during a wet etch release. The nanostructures are proposed to function as nanosprings for electromechanical sensors. Nanomanipulation inside a scanning electron microscope (SEM) was conducted to probe the structures for mechanical characterization. The results were validated by simulation.
Medical subject headings
- Arsenicals
- Crystallization
- Gallium
- Indium
- Models, Chemical
- Nanostructures
- Nanotechnology