Effects of modulus and surface chemistry of thiol-ene photopolymers in nanoimprinting.

Hagberg, Erik C; Malkoch, Michael; Ling, Yibo; Hawker, Craig J; Carter, Kenneth R · Nano Lett · 2007

basic_science · Level V

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Abstract

Thiol-ene photopolymers were studied as patternable resins for nanocontact molding imprint lithography. Photopolymerizable thiol and ene monomer mixtures were used, and after molding, patterned thiol-ene polymer features the size and shape of the original molds were replicated. Adhesion and release were examined and controlled by manipulating the surface chemistry of the substrate and mold. A direct correlation between cured thiol-ene polymer modulus and pattern fidelity was observed.