A class of low voltage, elastomer-metal 'wet' actuators for use in high-density microfluidics.
basic_science · Level V
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- Record sourced from PubMed, PMID 17268616.
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Abstract
We report a class of 'wet' MEMS elastomer-metal electrostatic actuators which can actuate in air, oil or water environments with no external fluidic connections, has actuation voltages lower than 15 V and is compatible with widespread PDMS microfluidics.
Medical subject headings
- Elastomers
- Microfluidic Analytical Techniques