Parallel fabrication of nanogap electrodes.

Abstract

We have developed a technique for simultaneously fabricating large numbers of nanogaps in a single processing step using feedback-controlled electromigration. Parallel nanogap formation is achieved by a balanced simultaneous process that uses a novel arrangement of nanoscale shorts between narrow constrictions where the nanogaps form. Because of this balancing, the fabrication of multiple nanoelectrodes is similar to that of a single nanogap junction. The technique should be useful for constructing complex circuits of molecular-scale electronic devices.