Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds.
basic_science · Level V
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- Record sourced from PubMed, PMID 18030383.
- Also identified by PMC identifier 2587163.
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Abstract
We present a novel method to create cavities in PDMS that is simple and exhibits wide process latitude allowing control over the radius of curvature to form shallow concave pits or deep spherical cavities.
Medical subject headings
- Dimethylpolysiloxanes
- Silicon
- Silicones