Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels.
basic_science · Level V
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- Record sourced from PubMed, PMID 18094776.
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Abstract
Sacrificially etched 2-D nanofluidic channels and nanospaces with integrated floor and ceiling electrodes and arbitrary channel geometries have been demonstrated with channel heights from 20 nm to 400 nm, widths from 800 nm to 40 microm, and lengths up to 3 mm, using SU-8 as the channel structural material.
Medical subject headings
- Chromium
- Gold
- Microfluidics
- Nanotechnology