Electron thermal microscopy.

Abstract

We present real-time, nanoscale temperature mapping using a transmission electron microscope and standard phase transitions in metal islands. Islands are deposited on the reverse side of commercially available silicon nitride membranes, while local thermal gradients are produced by Joule heating in a thin wire on the front side of the membrane. Change in contrast due to the liquid-solid transition in the islands allows the mapping of absolute temperature, as above or below the transition temperature, over the entire field-of-view. Experiments demonstrate nanoscale (<100 nm) resolution and video-rate (>30 thermal-images per second) speed, supported by combined electrical and thermal modeling. This provides a generic and adaptable platform for nanoscale thermal characterization independent of strong probe coupling and optical effects.