Control of InAs nanowire growth directions on Si.

Tomioka, Katsuhiro; Motohisa, Junichi; Hara, Shinjiroh; Fukui, Takashi · Nano Lett · 2008

basic_science · Level V

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Abstract

We report on control of growth directions of InAs nanowires on Si substrate. We achieved to integrate vertical InAs nanowires on Si by modifying initial Si(111) surface in selective-area metal-organic vapor phase epitaxy with flow-rate modulation mode at low temperature. Cross-sectional transmission electron microscope and Raman scattering showed that misfit dislocation with local strains were accommodated in the interface.