Nanocapacitive circuit elements.

Zareie, Hadi M; Morgan, Scott W; Moghaddam, Matthew; Maaroof, Abbas I; Cortie, Michael B; Phillips, Matthew R · ACS Nano · 2008

basic_science · Level V

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Abstract

"Natural" lithography was used to prepare arrays of nanoscale capacitors on silicon. The capacitance was verified by a novel technique based on the interaction of a charged substrate with the electron beam of a scanning electron microscope. The "nanocapacitors" possessed a capacitance of approximately 1 x 10(-16) F and were observed to hold charge for over an hour. Our results indicate that fabricating nanostructures using natural lithography may provide a viable alternative for future nanoelectronic devices.

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