Nonlithographic patterning and metal-assisted chemical etching for manufacturing of tunable light-emitting silicon nanowire arrays.
basic_science · Level V
Where this comes from
- Record sourced from PubMed, PMID 20423044.
- Also identified by DOI 10.1021/nl903841a.
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Abstract
Semiconductor nanowires have potential applications in photovoltaics, batteries, and thermoelectrics. We report a top-down fabrication method that involves the combination of superionic-solid-state-stamping (S4) patterning with metal-assisted-chemical-etching (MacEtch), to produce silicon nanowire arrays with defined geometry and optical properties in a manufacturable fashion. Strong light emission in the entire visible and near infrared wavelength range at room temperature, tunable by etching condition, attributed to surface features, and enhanced by silver surface plasmon, is demonstrated.
Medical subject headings
- Crystallization
- Lighting
- Nanostructures
- Nanotechnology
- Silicon
- Silver