Directed self-assembly at the 10 nm scale by using capillary force-induced nanocohesion.

Duan, Huigao; Berggren, Karl K · Nano Lett · 2010

basic_science · Level V

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Abstract

We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the formation of complex designed networks from a sparse array of nanostructures, suggesting a number of potential applications in fabrication of nanodevices, nanopatterning, and fluid-flow investigations.