Pore size control of ultrathin silicon membranes by rapid thermal carbonization.
basic_science · Level V
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- Record sourced from PubMed, PMID 20839831.
- Also identified by DOI 10.1021/nl101602z and PMC identifier 2967790.
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Abstract
Rapid thermal carbonization in a dilute acetylene (C(2)H(2)) atmosphere has been used to chemically modify and precisely tune the pore size of ultrathin porous nanocrystalline silicon (pnc-Si). The magnitude of size reduction was controlled by varying the process temperature and time. Under certain conditions, the carbon coating displayed atomic ordering indicative of graphene layer formation conformal to the pore walls. Initial experiments show that carbonized membranes follow theoretical predictions for hydraulic permeability and retain the precise separation capabilities of untreated membranes.