Multiplexed optical operation of distributed nanoelectromechanical systems arrays.

Sampathkumar, A; Ekinci, K L; Murray, T W · Nano Lett · 2011

basic_science · Level V

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Abstract

We report a versatile all optical technique to excite and read-out a distributed nanoelectromechanical systems (NEMS) array. The NEMS array is driven by a distributed, intensity modulated optical pump through the photothermal effect. The ensuing vibrational response of the array is multiplexed onto a single probe beam in the form of a high frequency phase modulation. The phase modulation is optically down converted to a low frequency intensity modulation using an adaptive full-field interferometer, and subsequently detected using a CCD array. Rapid and single step mechanical characterization of ∼44 nominally identical high-frequency resonators is demonstrated. The technique may enable sensitivity improvements over single NEMS resonators by averaging signals coming from a multitude of devices in the array. In addition, the diffraction limited spatial resolution may allow for position-dependent read-out of NEMS sensor chips for sensing multiple analytes or spatially inhomogeneous forces.