Lithographic patterning on polydimethylsiloxane surfaces using polydimethylglutarimide.
basic_science · Level V
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- Record sourced from PubMed, PMID 21445413.
- Also identified by DOI 10.1039/c0lc00732c.
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Abstract
We present a method for high fidelity lithographic patterning on polydimethylsiloxane (PDMS) surfaces employing traditional cleanroom equipment and commercially available materials that overcomes previous problems in PDMS processing. To illustrate this method, an electrostatically actuated microfluidic pump and rectangular diffraction gratings were fabricated on PDMS.