Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution.
basic_science · Level V
Where this comes from
- Record sourced from PubMed, PMID 21748145.
- Also identified by DOI 10.1039/c1lc20103d.
- No licence information is recorded for this record.
- Because redistribution is not established, this page shows the abstract only. Follow the links below for the full text.
Abstract
Water vapor sensing characterization of a metal resonator fabricated with an industrial 0.35 μm CMOS technology is reported. The resonator frequency is ∼13.2 MHz and exhibits a sensitivity magnitude of ∼3.5 kHz per %RH without requiring any additional hygroscopic coating layer. An on-chip integrated oscillator circuit enables an unprecedented resolution of 0.005 %RH.
Medical subject headings
- Metals
- Micro-Electrical-Mechanical Systems
- Nanotechnology
- Water