Monolithic integration of continuously tunable plasmonic nanostructures.

Lindquist, Nathan C; Johnson, Timothy W; Norris, David J; Oh, Sang-Hyun · Nano Lett · 2011

basic_science · Level V

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Abstract

We demonstrate precise three-dimensional integration of smooth bumps, grooves, and apertures in optically thick metal films using template stripping. Patterned silicon wafers are used as high-quality, reusable templates. The heights or depths of the metallic features are controlled to within 2 nm, giving continuously tunable optical properties with sharp and intense plasmonic resonances. Furthermore, we demonstrate a pick-and-place template stripping method in situ, enabling versatile three-dimensional micromanipulation, imaging, and characterization of nanoscale devices.

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