Chiral nematic fluids as masks for lithography.

Jeong, Hyeon Su; Kim, Yun Ho; Lee, Ji Sun; Kim, Jung Hyun; Srinivasarao, Mohan; Jung, Hee-Tae · Adv Mater · 2012

basic_science · Level V

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Abstract

A lithographic scheme is reported that uses a cholesteric liquid crystal with its helical axis in the plane of the sample as a "mask" for imprinting patterns in a photoresist over a large area. On the application of an electric field the cholesteric liquid crystals produce a texture that acts as a lattice of cylindrical lenses for one polarization of a light beam. This is used in photolithography to create parallel lines over large areas.

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