AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators.
basic_science · Level V
Where this comes from
- Record sourced from PubMed, PMID 22495881.
- Also identified by DOI 10.1002/adma.201104842.
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Abstract
An AlN/3C-SiC composite layer enables the third-order quasi-symmetric (QS(3)) Lamb wave mode with a high quality factor (Q) characteristic and an ultra-high phase velocity up to 32395 ms(-1). A Lamb wave resonator utilizing the QS(3) mode exhibits a low motional impedance of 91 Ω and a high Q of 5510 at a series resonance frequency (f(s)) of 2.92 GHz, resulting in the highest f(s)·Q product of 1.61 × 10(13) Hz among the suspended piezoelectric thin film resonators reported to date.
Medical subject headings
- Aluminum Compounds
- Carbon Compounds, Inorganic
- Silicon Compounds