Tailored star block copolymer architecture for high performance chemically amplified resists.
basic_science · Level V
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- Record sourced from PubMed, PMID 22961836.
- Also identified by DOI 10.1002/adma.201201547.
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Abstract
Star block copolymers are demonstrated for their application as a high-performance resist material. This new resist material shows advanced progress in sensitivity and solubility contrast and is finally combinatorially optimized to achieve a 66 nm line/space pattern. The tailored molecular architecture of the star block copolymer is synthesized via core-first atom transfer radical polymerization (ATRP) and shows narrow polydispersity indices below 1.2.
Medical subject headings
- Polymers