Large-area fabrication of periodic sub-15 nm-width single-layer graphene nanorings.
basic_science · Level V
Where this comes from
- Record sourced from PubMed, PMID 23108801.
- Also identified by DOI 10.1002/adma.201202626.
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Abstract
A periodically aligned array of graphene nanorings (GRNRs) with a sub-15 nm linewidth at a pitch of 450 nm is fabricated with a large area, 9 cm(2) , through conventional nanoimprint lithography coupled with sophisticated metal deposition and plasma-etching processes. The existence of the single-layer GRNRs is verified by various techniques.
Medical subject headings
- Graphite
- Nanoparticles