Rolled-up nanomembranes as compact 3D architectures for field effect transistors and fluidic sensing applications.

Grimm, Daniel; Bof Bufon, Carlos Cesar; Deneke, Christoph; Atkinson, Paola; Thurmer, Dominic J; Schäffel, Franziska; Gorantla, Sandeep; Bachmatiuk, Alicja et al. · Nano Lett · 2013

basic_science · Level V

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Abstract

We fabricate inorganic thin film transistors with bending radii of less than 5 μm maintaining their high electronic performance with on-off ratios of more than 10(5) and subthreshold swings of 160 mV/dec. The fabrication technology relies on the roll-up of highly strained semiconducting nanomembranes, which compacts planar transistors into three-dimensional tubular architectures opening intriguing potential for microfluidic applications. Our technique probes the ultimate limit for the bending radius of high performance thin film transistors.