A post silicon-on-insulator compatible smart tube technology.
basic_science · Level V
Where this comes from
- Record sourced from PubMed, PMID 23370972.
- Also identified by DOI 10.1039/c2lc41281k.
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Abstract
This paper reports a technology to fabricate micro-parylene tubes with integrated sensors. The unique advantage of this new technology is its ability to incorporate high-temperature solid-state materials. Standard CMOS and MEMS devices can be fabricated first on the silicon wafers and then the smart tubes are formed by taking advantage of XeF(2) isotropic silicon etching and conformal parylene coating.
Medical subject headings
- Micro-Electrical-Mechanical Systems
- Silicon