Transparent conductive gas-permeation barriers on plastics by atomic layer deposition.
basic_science · Level V
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- Record sourced from PubMed, PMID 23386315.
- Also identified by DOI 10.1002/adma.201204358.
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Abstract
A mixed-deposition atomic layer deposition process produces Hf:ZnO films with uniform dopant distribution and high electrical conductivity (resistivity = 4.5 × 10(-4) W cm), optical transparency (>85% from 400-1800 nm), and moisture-barrier property (water vapor transmission rate = 6.3 × 10(-6) g m(-2) day(-1)).