High k nanophase zinc oxide on biomimetic silicon nanotip array as supercapacitors.
basic_science · Level V
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- Record sourced from PubMed, PMID 23432577.
- Also identified by DOI 10.1021/nl304303p.
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Abstract
A 3D trenched-structure metal-insulator-metal (MIM) nanocapacitor array with an ultrahigh equivalent planar capacitance (EPC) of ~300 μF cm(-2) is demonstrated. Zinc oxide (ZnO) and aluminum oxide (Al2O3) bilayer dielectric is deposited on 1 μm high biomimetic silicon nanotip (SiNT) substrate using the atomic layer deposition method. The large EPC is achieved by utilizing the large surface area of the densely packed SiNT (!5 × 10(10) cm(-2)) coated conformally with an ultrahigh dielectric constant of ZnO. The EPC value is 30 times higher than those previously reported in metal-insulator-metal or metal-insulator-semiconductor nanocapacitors using similar porosity dimensions of the support materials.
Medical subject headings
- Biomimetic Materials
- Electric Capacitance
- Zinc Oxide