Wafer-scale production of uniform InAs(y)P(1-y) nanowire array on silicon for heterogeneous integration.

Shin, Jae Cheol; Lee, Ari; Mohseni, Parsian Katal; Kim, Do Yang; Yu, Lan; Kim, Jae Hun; Kim, Hyo Jin; Choi, Won Jun et al. · ACS Nano · 2013

basic_science · Level V

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Abstract

One-dimensional crystal growth allows the epitaxial integration of compound semiconductors on silicon (Si), as the large lattice-mismatch strain arising from heterointerfaces can be laterally relieved. Here, we report the direct heteroepitaxial growth of a mixed anion ternary InAsyP1-y nanowire array across an entire 2 in. Si wafer with unprecedented spatial, structural, and special uniformity across the entire 2 in. wafer and dramatic improvements in aspect ratio (>100) and area density (>5 × 10(8)/cm(2)). Heterojunction solar cells consisting of n-type InAsyP1-y (y = 0.75) and p-type Si achieve a conversion efficiency of 3.6% under air mass 1.5 illumination. This work demonstrates the potential for large-scale production of these nanowires for heterogeneous integration of optoelectronic devices.