Solvent-assisted directed self-assembly of spherical microdomain block copolymers to high areal density arrays.
basic_science · Level V
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- Record sourced from PubMed, PMID 23666897.
- Also identified by DOI 10.1002/adma.201300899.
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Abstract
The fabrication process for 5 Tb/in(2) bit patterns using solvent-assisted directed self-assembly is investigated. The N-methyl-2-pyrrolidone solvent vapor-annealing method was used to achieve good long-range lateral ordering of low-molecular-weight polystyrene-block-polydimethylsiloxane with a lattice spacing of 11 nm on flat Si substrates, PS modified substrates and lithographically patterned substrates, respectively.
Medical subject headings
- Polymers