Nanoimprint lithography with a focused laser beam for the fabrication of nanopatterned microchannel molds.

Lim, Hyungjun; Ryu, Jihyeong; Kim, Geehong; Choi, Kee-Bong; Lee, Sunghwi; Lee, Jaejong · Lab Chip · 2013

basic_science · Level V

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Abstract

We present a process based on nanoimprint lithography for the fabrication of a microchannel mold having nanopatterns formed at the bottoms of its microchannels. A focused laser beam selectively cures the resist in the micrometer scale during nanoimprint lithography. Nanopatterns within the microchannels may be used to control microfluidic behavior.

Medical subject headings