Nanoimprint lithography with a focused laser beam for the fabrication of nanopatterned microchannel molds.
basic_science · Level V
Where this comes from
- Record sourced from PubMed, PMID 23793420.
- Also identified by DOI 10.1039/c3lc50202c.
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Abstract
We present a process based on nanoimprint lithography for the fabrication of a microchannel mold having nanopatterns formed at the bottoms of its microchannels. A focused laser beam selectively cures the resist in the micrometer scale during nanoimprint lithography. Nanopatterns within the microchannels may be used to control microfluidic behavior.
Medical subject headings
- Lasers
- Microfluidic Analytical Techniques
- Nanotechnology
- Printing