Facile fabrication of single-crystal-diamond nanostructures with ultrahigh aspect ratio.
basic_science · Level V
Where this comes from
- Record sourced from PubMed, PMID 23798476.
- Also identified by DOI 10.1002/adma.201301343.
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Abstract
A robust and facile approach for making single-crystal-diamond MEMS and NEMS devices is presented. The approach relies entirely on commercial diamond material and standard cleanroom processes. As an example, batch fabrication of cantilever beams of thickness down to 45 nm and aspect ratios exceeding 2000:1 is demonstrated.
Medical subject headings
- Diamond
- Micro-Electrical-Mechanical Systems
- Nanostructures
- Nanotechnology