Direct-write thermocapillary dewetting of polymer thin films by a laser-induced thermal gradient.

Singer, Jonathan P; Lin, Pao-Tai; Kooi, Steven E; Kimerling, Lionel C; Michel, Jurgen; Thomas, Edwin L · Adv Mater · 2013

basic_science · Level V

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Abstract

A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free.