Graphene for true Ohmic contact at metal-semiconductor junctions.

Byun, Kyung-Eun; Chung, Hyun-Jong; Lee, Jaeho; Yang, Heejun; Song, Hyun Jae; Heo, Jinseong; Seo, David H; Park, Seongjun et al. · Nano Lett · 2013

basic_science · Level V

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Abstract

The rectifying Schottky characteristics of the metal-semiconductor junction with high contact resistance have been a serious issue in modern electronic devices. Herein, we demonstrated the conversion of the Schottky nature of the Ni-Si junction, one of the most commonly used metal-semiconductor junctions, into an Ohmic contact with low contact resistance by inserting a single layer of graphene. The contact resistance achieved from the junction incorporating graphene was about 10(-8) ~ 10(-9) Ω cm(2) at a Si doping concentration of 10(17) cm(-3).