Photo-roll lithography (PRL) for continuous and scalable patterning with application in flexible electronics.
basic_science · Level V
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- Record sourced from PubMed, PMID 24014277.
- Also identified by DOI 10.1002/adma.201303514.
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Abstract
A novel nanofabrication methodology for continuous, scalable, and geometry-tunable lithography is developed, named photo-roll lithography (PRL), by integrating photolithography with rollable processing. As a flexible mask attached to a quartz cylinder containing a UV source rolls over a photoresistcoated substrate, PRL realizes continuous photolithographic fabrication of various micro/nanoscale patterns with geometry that is tunable by controlling mask-substrate motions.