Fabrication of ordered, large scale, horizontally-aligned si nanowire arrays based on an in situ hard mask block copolymer approach.

Ghoshal, Tandra; Senthamaraikannan, Ramsankar; Shaw, Matthew T; Holmes, Justin D; Morris, Michael A · Adv Mater · 2014

basic_science · Level V

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Abstract

A simple technique is demonstrated to fabricate horizontal, uniform, and hexagonally arranged Sinanowire arrays with controlled orientation and density at spatially well defined locations on a substrate based on an in situ hard-mask pattern-formation approach by microphase-separated block-copolymer thin films. The technique may have significant application in the manufacture of transistor circuitry.