Large arrays and properties of 3-terminal graphene nanoelectromechanical switches.

Liu, Xinghui; Suk, Ji Won; Boddeti, Narasimha G; Cantley, Lauren; Wang, Luda; Gray, Jason M; Hall, Harris J; Bright, Victor M et al. · Adv Mater · 2014

biomechanical · Level V

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Abstract

Large arrays of 3-terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non-linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.