Efficient excitation of channel plasmons in tailored, UV-lithography-defined V-grooves.

Smith, Cameron L C; Thilsted, Anil H; Garcia-Ortiz, Cesar E; Radko, Ilya P; Marie, Rodolphe; Jeppesen, Claus; Vannahme, Christoph; Bozhevolnyi, Sergey I et al. · Nano Lett · 2014

basic_science · Level V

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Abstract

We demonstrate the highly efficient (>50%) conversion of freely propagating light to channel plasmon-polaritons (CPPs) in gold V-groove waveguides using compact 1.6 μm long waveguide-termination coupling mirrors. Our straightforward fabrication process, involving UV-lithography and crystallographic silicon etching, forms the coupling mirrors innately and ensures exceptional-quality, wafer-scale device production. We tailor the V-shaped profiles by thermal silicon oxidation in order to shift initially wedge-located modes downward into the V-grooves, resulting in well-confined CPPs suitable for nanophotonic applications.