The Patterning of Sub-500 nm Inorganic Oxide Structures.

Hampton, Meredith J; Williams, Stuart S; Zhou, Zhilian; Nunes, Janine; Ko, Doo-Hyun; Templeton, Joseph L; Samulski, Edward T; DeSimone, Joseph M · Adv Mater · 2008

basic_science · Level V

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Abstract

Elastomeric perfluoropolyether molds are applied to pattern arrays of sub-500 nm inorganic oxide features. This versatile soft-lithography technique can be used to pattern a wide range of materials; in this work inorganic oxides including TiO2 , SnO2 , ZnO, ITO, and BaTiO3 are patterned on a variety of substrates with different aspect ratios. An example of TiO2 posts is shown in the figure.