Origin of leakage paths driven by electric fields in Al-doped TiO2 films.

Park, Gyeong-Su; Park, Seong Yong; Heo, Sung; Kwon, Ohseong; Cho, Kyuho; Han, Kwan-Young; Kang, Sung Jin; Yoon, Aram et al. · Adv Mater · 2014

basic_science · Level V

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Abstract

The growth of leakage current paths in Al-doped TiO2 (ATO) films is observed by in situ TEM under negative bias stress. Through systematic HAADF-STEM, STEM-EDS, and STEM-EELS studies, it is confirmed that the electric field-induced growth of the Ru-doped TiO2 phase is the main reason for the ATO film's negative leakage.

Medical subject headings