The smallest resonator arrays in atmosphere by chip-size-grown nanowires with tunable Q-factor and frequency for subnanometer thickness detection.

Jiang, Chengming; Tang, Chaolong; Song, Jinhui · Nano Lett · 2015

basic_science · Level V

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Abstract

A chip-size vertically aligned nanowire (NW) resonator arrays (VNRs) device has been fabricated with simple one-step lithography process by using grown self-assembled zinc oxide (ZnO) NW arrays. VNR has cantilever diameter of 50 nm, which breakthroughs smallest resonator record (>100 nm) functioning in atmosphere. A new atomic displacement sensing method by using atomic force microscopy is developed to effectively identify the resonance of NW resonator with diameter 50 nm in atmosphere. Size-effect and half-dimensional properties of the NW resonator have been systematically studied. Additionally, VNR has been demonstrated with the ability of detecting nanofilm thickness with subnanometer (<10(-9)m) resolution.