Complex Materials by Atomic Layer Deposition.
basic_science · Level V
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- Record sourced from PubMed, PMID 26016695.
- Also identified by DOI 10.1002/adma.201500699.
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Abstract
Complex materials are defined as nanostructured materials with combinations of structure and/or composition that lead to performance surpassing the sum of their individual components. There are many methods that can create complex materials; however, atomic layer deposition (ALD) is uniquely suited to control composition and structural parameters at the atomic level. The use of ALD for creating complex insulators, semiconductors, and conductors is discussed, along with its use in novel structural applications.