One-Step Direct-Patterning Template Utilizing Self-Assembly of POSS-Containing Block Copolymers.

Hirai, Tomoyasu; Leolukman, Melvina; Liu, Chi Chun; Han, Eungnak; Kim, Yun Jun; Ishida, Yoshihito; Hayakawa, Teruaki; Kakimoto, Masa-Aki et al. · Adv Mater · 2009

basic_science · Level V

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Abstract

We report the self-assembly of organic-inorganic block copolymers (BCP) in thin-films by simple solvent annealing on unmodified substrates. The resulting vertically oriented lamellae and cylinders are converted to a hard silica mask by a single step highly selective oxygen plasma etching. The size of the resulting nanostructures in the case of cylinders is less than 10 nm.