Bottom-Up Nano-heteroepitaxy of Wafer-Scale Semipolar GaN on (001) Si.

Hus, Jui-Wei; Chen, Chien-Chia; Lee, Ming-Jui; Liu, Hsueh-Hsing; Chyi, Jen-Inn; Huang, Michael R S; Liu, Chuan-Pu; Wei, Tzu-Chiao et al. · Adv Mater · 2015

basic_science · Level V

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Abstract

Semipolar {101¯1} InGaN quantum wells are grown on (001) Si substrates with an Al-free buffer and wafer-scale uniformity. The novel structure is achieved by a bottom-up nano-heteroepitaxy employing self-organized ZnO nanorods as the strain-relieving layer. This ZnO nanostructure unlocks the problems encountered by the conventional AlN-based buffer, which grows slowly and contaminates the growth chamber.

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