From 1D to 3D: Tunable Sub-10 nm Gaps in Large Area Devices.

Zhou, Ziwei; Zhao, Zhiyuan; Yu, Ye; Ai, Bin; Möhwald, Helmuth; Chiechi, Ryan C; Yang, Joel K W; Zhang, Gang · Adv Mater · 2016

basic_science · Level V

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Abstract

Tunable sub-10 nm 1D nanogaps are fabricated based on nanoskiving. The electric field in different sized nanogaps is investigated theoretically and experimentally, yielding nonmonotonic dependence and an optimized gap-width (5 nm). 2D nanogap arrays are fabricated to pack denser gaps combining surface patterning techniques. Innovatively, 3D multistory nanogaps are built via a stacking procedure, processing higher integration, and much improved electric field.