Spontaneous Patterning of High-Resolution Electronics via Parallel Vacuum Ultraviolet.
basic_science · Level V
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- Record sourced from PubMed, PMID 27184834.
- Also identified by DOI 10.1002/adma.201506151.
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Abstract
A spontaneous patterning technique via parallel vacuum ultraviolet is developed for fabricating large-scale, complex electronic circuits with 1 μm resolution. The prepared organic thin-film transistors exhibit a low contact resistance of 1.5 kΩ cm, and high mobilities of 0.3 and 1.5 cm(2) V(-1) s(-1) in the devices with channel lengths of 1 and 5 μm, respectively.