Scanning Probe Nanopatterning and Layer-by-Layer Thinning of Black Phosphorus.

Liu, Xiaolong; Chen, Kan-Sheng; Wells, Spencer A; Balla, Itamar; Zhu, Jian; Wood, Joshua D; Hersam, Mark C · Adv Mater · 2017

basic_science · Level V

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Abstract

Nanopatterning and layer-by-layer thinning of black phosphorus is demonstrated with conductive atomic-force-microscope anodic oxidation. The liquid-phase patterning byproduct is readily removed by water rinsing. An alternating-current bias enables direct nanopatterning and thinning on insulating substrates such as SiO<sub>2</sub> /Si. Field-effect transistors with patterned channels show significant improvements in current modulation by up to a factor of 50.