Sub-50 nm Channel Vertical Field-Effect Transistors using Conventional Ink-Jet Printing.

Baby, Tessy Theres; Rommel, Manuel; von Seggern, Falk; Friederich, Pascal; Reitz, Christian; Dehm, Simone; Kübel, Christian; Wenzel, Wolfgang et al. · Adv Mater · 2017

basic_science · Level V

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Abstract

A printed vertical field-effect transistor is demonstrated, which decouples critical device dimensions from printing resolution. A printed mesoporous semiconductor layer, sandwiched between vertically stacked drive electrodes, provides <50 nm channel lengths. A polymer-electrolyte-based gate insulator infiltrates the percolating pores of the mesoporous channel to accumulate charge carriers at every semiconductor domain, thereby, resulting in an unprecedented current density of MA cm<sup>-2</sup> .